Polytechnique de Montreal & Regroupement Strategique en Microsystemes du Quebec

CNRS | IIS | EPFL | IMTEK | SNU | VTT | PM | KIMM | Univ.Paris-Est | Tohoku Univ. | NTHU | Univ.Washington

Web site:http://www.polymtl.ca/


Research fields

Multimedia, information technology and telecommunications; Life sciences and engineering; Advanced materials and nanotechnology; Environment, energy and sustainable development; High-technology manufacturing and aerospace
engineering; Systems science and engineering; Training and learning technologies in science and engineering


6000 students, 220 professors, 800 employees

Research topics in Micro and NanoSystems

・Optical MEMS
・Adaptive optics
・Laser micromachining
・Multiphysics design tools development
・Microelectronics integration


・450 m2 clean rooms class 1000
・UV lithography
・Focus Ion Beam (FIB)
・Parylene deposition
・MOVPE for III-V and magnetic semiconductors
・Si & SOI surface and bulk micromachining (DRIE)
・Electroplating, Electro Discharge Machining
・Flip chip bonding
・Critical Point Dryer, vapor HF, XeF2 Si etching

Design, simulation & characterization tools

・Cadence, ANSYS, Coventor, MEMSPro
・Spectrometers: X-ray Photoelectrons (XPS),Time of Flight secondary ion mass (TOF-SIMS),Infrared (FTIR), Raman
・Microscopes: optical, SEM, TEM, AFM, NSOM
・Nano-triboindenter, Micro scratch tester,Tribometer ‘pin-on-disc’, Slip/peel tester
・Environmental dynamic optical profiler,Ellipsometers (UV-VIS-NIR and IR)

NAMIS members laboratories

Ecole Polytechnique de Montreal

Micro and Nano Systems Laboratory (LMNS)
Prof. Yves Alain PETER
Microfabrication Laboratory (LMF)
Prof. Yves Alain PETER
PDF:BrochureSmall-labsEPMPeter 2012
Nanorobotics Laboratory
Prof. Sylvain MARTEL
PDF:BrochureSmall-labsEPMMartel-therriault 2012
Laboratory of Multiscale Mechanics (LM2)
PDF:BrochureSmall-labsEPMMartel-therriault 2012
Polystim Neurotechnologies Laboratory and
Assembly & Packaging Laboratory (LASEM
Prof. Mohamad SAWAN
PDF:Brochure_Polystim 2012

Microsystem Strategic Alliance of Quebec (ResMiQ)

Ecole Polytechnique de Montreal, Universite du Quebec en Ouataouais, Universite de Quebec a Chicoutimi, Universite du Quebec a Trois rivieres, Universite du Quebec/Ecole de Technologie Superieure, Universite de Sherbrooke, Universite de Montreal, Concordia University, Universite Laval, University Mc Gill, UQAM
Prof. Mohamad SAWAN
Regroupement quebecois sur les materiaux de pointe (RQMP)
Prof. Yves Alain PETER