Micro/Nano-Machining Research and Education Center (MNC) Tohoku University

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Web site:http://vbl.mech.tohoku.ac.jp/index_e.html

About

Micro/Nano-Machining research and Education Center (NMC, former Venture Business Laboratory: VBL) was established in 1996 by the fund of Japanese Government. The responsibilities for research and development in MNC are shared among all the faculties of Tohoku University, The faculty of Engineering maintains the prime responsibility for the NMC. NMC’s primary mission is educational and to provide the facilities and working environment that makes possible graduate education through research in the area of “Micro- and Nano-Machining” and “Integrated Microsystem technologies”.

Research topics

・Micro/Nano-machining for MEMS/NEMS
・Integrated microsystems and Microelectronics (LSIs)
・Sensors and Micromachines
・Micro-optics and Optical MEMS/NEMS
・Bio-MEMS, RF-MEMS, Power-MEMS
・Micro/Nano processing

Technology

・Totally 725 m2 clean rooms for MEMS and LSIs
・Bulk micromachining and LSI processes
・Laser & e-beam pattern generators and I-line stepper for mask patterning
・CVDs, RIEs, DRIEs, XeF2 etchnig, FAB
・Electroplating & Wafer bonding
・Wafer-level packaging technologies
・Nano-prosessing using UHV

Design, simulation & characterization tools

・ULSI design tools
・CAD for MEMS, CAD for ULSI
・SEMs, FE-SEM, SIMS, FIB, XPS, STM, AFM
・Laser microscopies, IR ellipso, FTIR
・Optical profilers & vibrometers
・LSI tester, thermal imager,
・Wavelength tunable lasers, UV, V and IR lasers and time resolved spectrometer

NAMIS members laboratories

Micro/Nano-Machining Research and Education Center (MNC)
Director: Prof. Hiroki KUWANO
Contact: Prof. Kazuhiro HANE
PDF:BrochureTohoku MNC topics 2012