Institute of NanoEngineering & MicroSystems (iNEMS) National Tsing Hua University

CNRS | IIS | EPFL | IMTEK | SNU | VTT | EPM | KIMM | Univ.Paris-Est | Tohoku Univ. | NTHU | Univ.Washington

Web site:http://www.nems.nthu.edu.tw/en/Introduction.php

About

The mission of the NEMS Institute is to bring together the MEMS/NEMS-related education, researches and related resources to facilitate the integration effort in the multidisciplinary themes behind science and technology of “miniaturization”. The fields of interest include (1) Biomedical microdevices, (2) RF MEMS, (3) Optical MEMS, (4) Nano-sensors and (5) Nanotechnology. The Institute has 15 faculties (8 full-time and 7 adjunct professors) in 2010 directing advanced research and offering graduate courses. The Institute currently admits 20 M.S. and 16 Ph.D. students each year. At present, there are 43 M.S. and 65 Ph.D. students enrolled at the iNEMS.

iNEMS NAMIS members

・Cellular & Molecular BioMEMS Lab (Pr. L.-S. Fan)
・Advanced LIGA Lab (Pr. C.-C. Fu)
・Nano-Optoelectronics & Biomedical Lab (Pr. M.-F. Lai)
・RF MicroSystems Lab (Pr. S.-S. Li)
・Flexible Printronics Lab (Pr. C.-Y. Lo)
・Bioelectronics and Nanosystems Lab (Pr. Y.-L Wang)
・Bio-Medical Thermo-Fluidic Lab (Pr. D.-J. Yao)
・Quantum Microsystems Lab (Pr. J. A. Yeh)
・Molecular Mechanisms Lab (Pr. Y.-C. Chang)
・Integrated and Control of Microsystems Lab (Pr. R.-S. Chen)
・Micro Device Lab (Pr. W. Fang) Nano Device Lab (Pr. S. Gwo)
・Green Tech. & Mass Spec. Analysis Lab (Pr. Y.-C. Ling)
・MEMS Design Lab (Pr. S.-C. Lu)
・Nano-Bio-Opto-Electro-Mech. Systems Lab (Pr. F.-G Tseng)

Technology

・1000 m2 clean room class 100, 1000, 10000
・UV, DUV, laser & e-beam lithographies, nanoimprint
・Si & SOI surface and bulk micromachining, LIGA
・CMOS-MEMS technologies
・Etching: KOH, TMAH, RIE, DRIE, IBE
・HF Vapor, Supercritical CO2 drying, XeF2
・Electroplating & UV micromolding
・Technology on flexible substrates
・Wafer-level packaging technologies

Design, simulation & characterization tools

・Cadence, ANSYS, Coventor, Comsol Multiphysics
・Magnetic resonance spectroscopy & imaging
・X-ray diffraction, contact angle, AES
・Microscopies: FE, Confocal, SEM, AFM
・Optical profilers & vibrometers (in-plane & out-of-plane)
・InfraScope thermal imaging
・Bio/chemical characterization equipments
・Optical characterization equipments
・RF characterization equipments, network analyzers

NAMIS members laboratories

Cellular & Molecular BioMEMS Lab
Prof. L.-S. Fan
PDF:NAMIS-INEMS 2012_02_2
Advanced LIGA Lab
Prof. C.-C. Fu
PDF:NAMIS-INEMS 2012_02_2
Nano-Optoelectronics & Biomedical Lab
Prof. M.-F. Lai
PDF:NAMIS-INEMS 2012_02_3
RF MicroSystems Lab
Prof. S.-S. Li
PDF:NAMIS-INEMS 2012_02_3
Flexible Printronics Lab
Prof. C.-Y. Lo
PDF:NAMIS-INEMS 2012_02_4
Bioelectronics and Nanosystems Lab
Prof. Y.-L Wang
PDF:NAMIS-INEMS 2012_02_4
Bio-Medical Thermo-Fluidic Lab
Prof. D.-J. Yao
Quantum Microsystems Lab
Prof. J. A. Yeh
PDF:NAMIS-INEMS 2012_02_5
Molecular Mechanisms Lab
Prof. Y.-C. Chang
Integrated and Control of Microsystems Lab
Prof. R.-S. Chen
Micro Device Lab
Prof. W. Fang
Nano Device Lab
Prof. S. Gwo
Green Tech. & Mass Spec. Analysis Lab
Prof. Y.-C. Ling
MEMS Design Lab
Prof. S.-C. Lu
Nano-Bio-Opto-Electro-Mech. Systems Lab
Prof. F.-G Tseng